Department of Chemical Engineering, Hanyang University, Seoul 04763, Republic of Korea Research Institute of Industrial Science, Hanyang University, Seoul 04763, Republic of Korea Article Views are ...

† School of Chemistry and Chemical Engineering, Southeast University, Nanjing 211189, People's Republic of China ‡ Biochemical and Environmental Engineering College, Nanjing Xiaozhuang University, ...

while monofluorides are tentatively identified as the most reactive agent in the case of Si-rich SiNx:H layers where Si-N or, depending on the composition of the etching media, Si-Si bonds have to be ...